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Tris(dimethylamino)silane 3DMAS 三(二甲氨基)硅烷

規格: 99.9%(99.9999%-Si)
CAS: 15112-89-7
產品編號: H35891
MDL: MFCD00048006
品牌: INFI

ALD簡介

   原子層沉積技術(Atomic Layer Deposition，簡稱ALD)是一種在納米尺度上進行薄膜沉積的先進技術。通過將物質以單原子形式一層一層的鍍在基底表面，擁有優異的三維共形性、大面積成膜的均勻性和精確控制膜厚等特點。

ALD應用

ALD在能源領域應用

2009年，Miyaska課題組將鈣鈦礦材料MAPbI3用作燃料敏化太陽能電池的光伏活性層，正式開啟了鈣鈦礦太陽能電池的新紀元。ALD憑借其均勻成膜性、精準控制厚度和保形性等多種優勢，在光伏領域中發揮著重要作用。除此之外，ALD技術還可用于鋰電池薄膜涂層，提高電池性能。

ALD在泛半導體應用

隨著泛半導體行業的發展，對微型化和集成化要求越來越高，尺寸縮小至亞微米和納米量級，ALD作為一種高精度薄膜沉積技術，可用于晶體管柵極電介質層(高K材料)、金屬柵電極、有機發光顯示器涂層、銅互聯擴散阻擋層、DRAM電介質層、微流體和MEMS涂層、傳感器等眾多領域。

ALD在光學領域應用

由于 ALD 具有的三維共形沉積和大面積均勻性特點，已成功應用于高質量光學薄膜、增透膜、折射率可調的光學薄膜、波狀多層膜，改善了光子晶體的光學性質和可控性，增加了光子晶體在未來光學器件中的應用潛力。

 公司致力于ALD高純半導體薄膜前驅體材料的自主研發和生產，成立以來，已陸續向多家半導體客戶提供了百余種前驅體新材料，包括高純硅基前驅體系列、High-k前驅體系列產品，部分新品已被客戶用于5nm以下制程薄膜設備。我們致力為客戶提供優質的產品并建立互信、長久的合作關系，產品具有自主知識產權且原材料國產化，打破國外壟斷的同時保證供應鏈的安全。研峰科技愿與國內芯片、高端顯示、光伏新能源等高端客戶一起攜手，解決高端半導體材料的把脖子難題，早日實現進口替代。




Chemical NameTris(Dimethylamino)Silane 3DMAS
Synonym (Me2N)3SiH N,N,N',N',N'',N''-Hexamethylsilanetriamine TDMAS Tris(dimethylamido)silane Tris(dimethylamino)silane (Me2N)3SiH 三(二甲胺基)硅烷 N,N,N',N',N'',N''-Hexamethylsilanetriamine TDMAS Tris(dimethylamido)silane Tris(dimethylamido)silane (Me2N)3SiH N,N,N',N',N'', N''-Hexamethylsilanetriamine N,N,N',N',N'',N''-Hexamethylsilanetriamine TDMAS Tris(dimethylamido)silane
EC Number239-165-0
MDL NumberMFCD00048006
Chemical Name Translation三(二甲胺基)硅烷
Beilstein Registry Number1901643
CAS Number15112-89-7
PubChem Substance ID329758267
GHS Symbol
TYPE OF TEST            : LD50 - Lethal dose, 50 percent kill
ROUTE OF EXPOSURE       : Administration onto the skin
SPECIES OBSERVED        : Rodent - rabbit
DOSE/DURATION           : 477 mg/kg
TOXIC EFFECTS :
   Lungs, Thorax, or Respiration - chronic pulmonary edema
   Liver - other changes
   Nutritional and Gross Metabolic - weight loss or decreased weight gain
REFERENCE :
   TIHEEC Toxicology and Industrial Health.  (Princeton Scientific Pub. Co.,
   POB 2155, Princeton, NJ 08540)  V.1-    1985-  Volume(issue)/page/year:
   5,45,1989

TYPE OF TEST            : LD50 - Lethal dose, 50 percent kill
ROUTE OF EXPOSURE       : Oral
SPECIES OBSERVED        : Rodent - rat
DOSE/DURATION           : 594 mg/kg
TOXIC EFFECTS :
   Lungs, Thorax, or Respiration - dyspnea
   Gastrointestinal - other changes
   Nutritional and Gross Metabolic - weight loss or decreased weight gain
REFERENCE :
   TIHEEC Toxicology and Industrial Health.  (Princeton Scientific Pub. Co.,
   POB 2155, Princeton, NJ 08540)  V.1-    1985-  Volume(issue)/page/year:
   5,45,1989

TYPE OF TEST            : LC50 - Lethal concentration, 50 percent kill
ROUTE OF EXPOSURE       : Inhalation
SPECIES OBSERVED        : Rodent - rat
DOSE/DURATION           : 38 ppm/6H
TOXIC EFFECTS :
   Sense Organs and Special Senses (Eye) - lacrimation
   Behavioral - ataxia
   Gastrointestinal - changes in structure or function of salivary glands
REFERENCE :
   TIHEEC Toxicology and Industrial Health.  (Princeton Scientific Pub. Co.,
   POB 2155, Princeton, NJ 08540)  V.1-    1985-  Volume(issue)/page/year:
   5,45,1989

WGK Germany3
Hazard statements
  • H314 Causes severe skin burns and eye damage 導致嚴重的皮膚灼傷和眼睛損傷
  • H330 Fatal if inhaled 吸入致命
  • H311 Toxic in contact with skin 皮膚接觸中毒
  • H261 In contact with water releases flammable gas 與水接觸時釋放可燃氣體。
  • H225 Highly flammable liquid and vapour 高度易燃液體和蒸氣
  • H302 Harmful if swallowed 吞食有害
    Personal Protective Equipment Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
    RTECSVV5800000
    Precautionary statements
    • P402+P404
    • P231+P232
    • P280 Wear protective gloves/protective clothing/eye protection/face protection. 戴防護手套/防護服/眼睛的保護物/面部保護物。
    • P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking. 遠離熱源/火花/明火/熱的表面。——禁止吸煙。
    • P370+P378
    • P403+P235
    • P260 Do not breathe dust/fume/gas/mist/vapours/spray. 不要吸入粉塵/煙/氣體/煙霧/蒸汽/噴霧。
    • P284 Wear respiratory protection.? 佩戴呼吸保護裝置。
    • P422 Store contents under… 存儲目錄在…之下。
      Signal word Danger
      Hazard Codes F,C
      Safety Statements
      • S45 In case of accident or if you feel unwell seek medical advice immediately (show the label where possible) 發生事故時或感覺不適時，立即求醫（可能時出示標簽）；
      • S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接觸后，立即用大量水沖洗并征求醫生意見；
      • S36/37/39 Wear suitable protective clothing, gloves and eye/face protection 穿戴適當的防護服、手套和眼睛/面保護；
      • S43 In case of fire use ... (indicate in the space the precise type of fire-fighting equipment. If water increases the risk add -?Never use water) 著火時使用（指明具體的消防器材種類，如果用水增加危險，注明“禁止用水”
      • S16 Keep away from sources of ignition - No smoking 遠離火源，禁止吸煙；
        Risk Statements
        • R11 Highly flammable 非常易燃
        • R20 Harmful by inhalation 吸入有害
        • R29 Contact with water liberates toxic gas. 遇水釋放出有毒氣體
        • R34 Causes burns 會導致灼傷
        • R52/53
        • R15 Contact with water liberates extremely flammable gases 遇水會釋放出極端易燃的氣體
          Restrict 危險品
          15112-89-7 H35891 Tris(dimethylamino)silane 3DMAS 三(二甲氨基)硅烷
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          化學屬性

          Mol. Formula[(CH3)2N]3SiH
          Mol. Weight161
          Density0.84
          Boiling Point145-148°C (4°C/16mm)
          Melting Point-90 °C (lit.)
          Flash Point77°F
          Appearance colorless to light yellow liq.
          Stabilityair sensitive, moisture sensitive
          Danger-Level-
          pH-:-
          Redox-

          *以上化合物性質及應用等信息僅供參考